In: Proc. IEEE Int. Conf. on Systems, Man, and Cybernetics (SMC'99), 12-15 October 1999, Tokyo, Japan, Vol. 3, pages 763-768. 1999.
Abstract: The paper presents an efficient method that applies Markovian timed Petri nets to performance analysis of semiconductor manufacturing systems. Uniformization technique is used to establish both lower and upper bounds on the performance characteristics. These bounds are computed using linear programming methods. Different experiments have been conducted on medium-size semiconductor manufacturing models to test the accuracy of the proposed technique. Preliminary results on the relationship of the solution and the constraints are discussed.
Keywords: linear programming, performance bounds, semiconductor manufacturing systems, timed Petri nets, uniformization.