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Colored timed Petri nets modeling and job scheduling using GA of semiconductor manufacturing.

Kang, S.J.; Jang, S.H.; Hwang, H.S.; Woo, K.B.

In: IEICE Trans. on Information and Systems, Vol. E82-D, No. 11, pages 1483-1485. 1999.

Abstract: In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm(GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.

Keywords: colored Petri nets, genetic algorithms, heuristic job scheduling, semiconductor manufacturing system, timed Petri nets.

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