In: Proc. IEEE Int. Conf. on Systems, Man, and Cybernetics (SMC'2000), 8-11 October 2000, Nashville, TN, Vol. 4, pages 3063-3068. 2000.
Abstract: Timed Petri nets are used as models of cluster tools, representing not only the concurrency activities of different chambers, but also the durations of these activities. Structural analysis, based on net invariants, provides basic performance measures, such as throughput and cycle time. The results are obtained in symbolic form, so many specific variants can easily be compared without repeated analyses of the models.
Keywords: cluster tools, timed Petri nets.