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Modeling, analysis, simulation and control of semiconductor manufacturing systems: a generalized stochastic colored timed Petri net approach.

Lin, M.-H.; Fu, L.-C.

In: Proc. IEEE Int. Conf. on Systems, Man, and Cybernetics (SMC'99), 12-15 October 1999, Tokyo, Japan, Vol. 3, pages 769-774. 1999.

Abstract: A generalized stochastic colored timed Petri net (GSCTPN) is used to model an IC wafer fabrication system. There are two different automated guided vehicle systems, namely, Interbay system and Intrabay system. For multiple-load and variable-speed AGV systems, a simple motion--planning rule has been embedded and a collision avoidance strategy has been introduced in the model to solve the variable speed and traffic jam problems of vehicles. The simple control policies for AGVs routing are discussed. The heuristic rules for the lot release and lot scheduling are also studied. To obtain performance measures, simulation is used. To show the promising potential of the proposed work, a real-world IC wafer fabrication system is used as a target plant layout for implementation.

Keywords: colored Petri nets, semiconductor manufacturing systems, stochastic Petri nets, timed Petri nets.

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