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Keyword: simulation techniques
Jeng, M.D.
;
Xie, X.L.
;
Chou, S.W.
:
Modeling, qualitative-analysis, and performance evaluation of the etching area in an IC wafer fabrication system using Petri nets.
1998.
Kelling, C.
;
Henz, J.
;
Hommel, G.
:
Design of a communication scheme for a distributed controller architecture using stochastic Petri nets.
1995.
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